Question
Download Solution PDFThe desired property of gate and interconnection metallization is
Answer (Detailed Solution Below)
Detailed Solution
Download Solution PDFConcept:
- Gate and interconnection metallization controls the speed of the circuit by controlling the resistance of the interconnection lines.
- For high speed operation, such resistance should be as small as possible.
- The gate and interconnection metallization also controls flat band voltage VFB, which is essential to maintain a flat band condition
- The contact metallization gives electrically and mechanically stable ohmic contact having contact resistance negligibly small compared to the device
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